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  • Á¦Ç°¸í(Description) RIE SYSTEM
    Á¦Ç°È¸»ç(Makers) NSC
    Á¦Ç°Æ¯¼º(Specificity) °íÀåÇؼ®¿ë DRY ETCHING ÀåÄ¡. Á¤¹æ¼º, À̹漺À¸·Î EATCHING.PASSIVATION¸·, Ãþ°£¸·À» Á¦°ÅÇÏ´Â °íÀåÇؼ®Àü¿ëÀÇ DRY ETCHINGÀåÄ¡.DRY ETCHING SYSTEM FOR IC/FINE PROCESS IC/WAFER