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RIE SYSTEM
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Á¦Ç°¸í(Description)
RIE SYSTEM
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NSC
Á¦Ç°Æ¯¼º(Specificity)
°íÀåÇؼ®¿ë DRY ETCHING ÀåÄ¡. Á¤¹æ¼º, À̹漺À¸·Î EATCHING.PASSIVATION¸·, Ãþ°£¸·À» Á¦°ÅÇÏ´Â °íÀåÇؼ®Àü¿ëÀÇ DRY ETCHINGÀåÄ¡.DRY ETCHING SYSTEM FOR IC/FINE PROCESS IC/WAFER